June 9 — 11, 2009 «ATC – Semiconductor Technologies and Equipment, JSC» took part in scientific and technical seminar «Vacuum equipment and technology-2009».

Conference subjects:

• Physics of vacuum and calculation of vacuum systems,
• V acuum gauge s and control of tightness,
• Arrangement of vacuum conditions and elements of vacuum systems,
• Vacuum technological processes and equipment.

On June, 11th during the work of section «Vacuum technologies» our company presented the report «Electron Beam Evaporation systems for deposition of ultrapure thin metal films».