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14.09.2009

HIGH TECHNOLOGIES TO RUSSIAN INDUSTRIES

September 9 — 11, 2009 Moscow Bauman State Technical University spent XV International scientific and technical conference «HIGH TECHNOLOGIES TO RUSSIAN INDUSTRIES (Materials and devices of functional electronics and microphotonics)»

«ATC – Semiconductor Technologies and Equipment, JSC» presented the report «Complex of equipment for low ohmic contact formation to (Al,Ga)N/GaN HEMT».