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Our History

2001-2002

Carried out deep modernization of MBE systems, produced in the USSR.

2003-2004

Developed EPN3 MBE System, intended for growth of III-Nitrides

2005-2006 


Successfully completed tests of MBE experimental model. New STE System provided growth of nanoheterostructures based on compounds A3B5 and Si-Ge. Serial MBE System production was begun. 

2006-2007

Produced first models of equipment for wafer processing: plasma-chemical etching, electron-beam deposition, thermal annealing

2007-2008

Produced new MBE STE3532 System, configured for A3Bgrowth

2008-2009

Designed and produced first two-reactor STE3526 system for growth of hybrid nanoheterostructures A3B5/A2B6 considering the latest achievements in these materials systems

2009-2010

RUSNANO OJSC approved infrastructure project with SemiTEq JSC participation. SemiTEq JSC concluded contract with one of India's leading laboratories MO - DRDO in Solid State Physics Laboratory (SSPL, New Delhi) for supply of STE3N2 System with plasma source.

2011-2012

New complex product - Nanolaboratory was developed under the state contract. Application Lab was put into operation.